FORM 4
Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
WHANG JONG S
   2. Issuer Name and Ticker or Trading Symbol
AMTECH SYSTEMS INC [asys] 		5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
Chief Executive Officer
(Last)
(First)
(Middle)
3. Date of Earliest Transaction (Month/Day/Year)
09/07/2010
(Street)

 		 4. If Amendment, Date Original Filed(Month/Day/Year)
 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security
(Instr. 3)		 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code
(Instr. 8)		 4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 and 5)		 5. Amount of Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 3 and 4)		 6. Ownership Form: Direct (D) or Indirect (I)
(Instr. 4)		 7. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V Amount (A) or (D) Price
Amtech Systems, Inc. $.01 par value common stock 09/07/2010   M   29,400 A $ 6.5315 119,400 D  
Amtech Systems, Inc. $.01 par value common stock 09/07/2010   S   29,400 D $ 16.2725 90,000 D  
Amtech Systems, Inc. $.01 par value common stock 09/08/2010   M   24,100 A $ 6.5315 114,100 D  
Amtech Systems, Inc. $.01 par value common stock 09/08/2010   S   24,100 D $ 16.0559 90,000 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   M   42,800 A $ 6.5315 132,800 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   300 D $ 15.81 132,500 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   1,400 D $ 15.83 131,100 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   750 D $ 15.76 130,350 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   1,000 D $ 15.91 129,350 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   1,300 D $ 15.94 128,050 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   800 D $ 15.92 127,250 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   4,100 D $ 15.93 123,150 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   398 D $ 16.01 122,752 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   200 D $ 16.10 122,552 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   300 D $ 16.09 122,252 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   200 D $ 16.08 122,052 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   1,200 D $ 16 120,852 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   500 D $ 16.02 120,352 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   1,350 D $ 15.89 119,002 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   3,049 D $ 15.90 115,953 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   1,050 D $ 15.96 114,903 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   500 D $ 15.99 114,403 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   4,351 D $ 15.95 110,052 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   100 D $ 15.98 109,952 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   1,202 D $ 15.97 108,750 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   1,100 D $ 16.03 107,650 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   900 D $ 16.06 106,750 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   300 D $ 16.05 106,450 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   1,100 D $ 16.04 105,350 D  
Amtech Systems, Inc. $.01 par value common stock 09/09/2010   S   200 D $ 15.88 105,150 D  

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 3)		 2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code
(Instr. 8)		 5. Number of Derivative Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4, and 5)		 6. Date Exercisable and Expiration Date
(Month/Day/Year)		 7. Title and Amount of Underlying Securities
(Instr. 3 and 4)		 8. Price of Derivative Security
(Instr. 5)		 9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 4)		 10. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 4)		 11. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares
Amtech Systems, Inc. Employee Stock Option $ 6.5315 09/07/2010   M   29,400   03/15/2006 03/15/2011 Amtech Systems, Inc. $.01 par value common stock 29,400 (1) 105,600 (2) D  
Amtech Systems, Inc. Employee Stock Option $ 6.5315 09/08/2010   M   24,100   03/15/2006 03/15/2011 Amtech Systems, Inc. $.01 par value common stock 24,100 (1) 81,500 (2) D  
Amtech Systems, Inc. Employee Stock Option $ 6.5315 09/09/2010   M   42,800   03/15/2006 03/15/2011 Amtech Systems, Inc. $.01 par value common stock 42,800 (1) 38,700 (3) D  

Reporting Owners

Reporting Owner Name / Address Relationships
 Director  10% Owner  Officer  Other
WHANG JONG S

 		       Chief Executive Officer  

Signatures

 Robert T. Hass on behalf of Jong S. Whang by Power of Attorney   09/09/2010
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 4(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) Price omitted because the transaction is a grant of a stock option.
(2) This is the number of derivative securities, with the same terms and conditions, following the reported transaction.
(3) This is the number of derivative securities, with the same terms and conditions, following the reported transaction. Total of all derivative securities, with different terms and conditions, held following the reported transaction is 188,700.

Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.

Potential persons who are to respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB number.