Ownership Submission

FORM 4

Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940

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3235-0287

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(Print or Type Responses)

1. Name and Address of Reporting Person ^*

WANSEM PAUL J VAN DER

2. Issuer Name and Ticker or Trading Symbol
AMTECH SYSTEMS INC [ASYS]

5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)

__X__ Director	_____ 10% Owner
__X__ Officer (give title below)	_____ Other (specify below)
See Remarks

(Last)

(First)

(Middle)

C/O AMTECH SYSTEMS, INC.,, 131 SOUTH CLARK DRIVE

3. Date of Earliest Transaction (Month/Day/Year)
01/30/2015

(Street)

TEMPE, AZ 85281

4. If Amendment, Date Original Filed(Month/Day/Year)

6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person

(City)

(State)

(Zip)

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned

1.Title of Security (Instr. 3)	2. Transaction Date (Month/Day/Year)	2A. Deemed Execution Date, if any (Month/Day/Year)	3. Transaction Code (Instr. 8)		4. Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5)			5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4)	6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
1.Title of Security (Instr. 3)	2. Transaction Date (Month/Day/Year)	2A. Deemed Execution Date, if any (Month/Day/Year)	Code	V	Amount	(A) or (D)	Price		6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4)	7. Nature of Indirect Beneficial Ownership (Instr. 4)
Common Stock	01/30/2015		A		337,295	A	⁽¹⁾	337,295	D
Common Stock	01/30/2015		A		120,122	A	⁽²⁾	120,122	I	By Family LTP ⁽³⁾
Common Stock	01/30/2015		A		37,847	A	⁽⁴⁾	37,847	I	By Wife ⁽⁵⁾
Common Stock	01/30/2015		A		29,733	A	⁽⁶⁾	29,733	I	By Family Trust ⁽⁷⁾

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
	Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB control number.		SEC 1474 (9-02)

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)

1. Title of Derivative Security
(Instr. 3)

2. Conversion or Exercise Price of Derivative Security

3. Transaction Date (Month/Day/Year)

3A. Deemed Execution Date, if any (Month/Day/Year)

4. Transaction Code
(Instr. 8)

5. Number of Derivative Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4, and 5)

6. Date Exercisable and Expiration Date
(Month/Day/Year)

7. Title and Amount of Underlying Securities
(Instr. 3 and 4)

8. Price of Derivative Security
(Instr. 5)

9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 4)

10. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 4)

11. Nature of Indirect Beneficial Ownership
(Instr. 4)

Code

(A)

(D)

Date Exercisable

Expiration Date

Title

Amount or Number of Shares

Stock Options (right to buy)

$ 30.54

01/30/2015

21,720

01/30/2015

05/16/2015

Common Stock

21,720

⁽⁸⁾

21,720

Stock Options (right to buy)

$ 15.23

01/30/2015

10,860

01/30/2015

10/31/2015

Common Stock

10,860

⁽⁹⁾

10,860

Stock Options (right to buy)

$ 12.34

01/30/2015

10,860

01/30/2015

05/15/2016

Common Stock

10,860

⁽¹⁰⁾

10,860

Stock Options (right to buy)

$ 17.6

01/30/2015

16,455

01/30/2015

10/26/2016

Common Stock

16,455

⁽¹¹⁾

16,455

Stock Options (right to buy)

$ 16.35

01/30/2015

11,518

01/30/2015

05/21/2017

Common Stock

11,518

⁽¹²⁾

11,518

Stock Options (right to buy)

$ 21.24

01/30/2015

11,518

01/30/2015

11/01/2017

Common Stock

11,518

⁽¹³⁾

11,518

Stock Options (right to buy)

$ 27.47

01/30/2015

6,911

01/30/2015

05/20/2018

Common Stock

6,911

⁽¹⁴⁾

6,911

Stock Options (right to buy)

$ 10.82

01/30/2015

6,911

01/30/2015

11/03/2018

Common Stock

6,911

⁽¹⁵⁾

6,911

Stock Options (right to buy)

$ 9.21

01/30/2015

8,227

01/30/2015

06/04/2019

Common Stock

8,227

⁽¹⁶⁾

8,277

Stock Options (right to buy)

$ 6.08

01/30/2015

8,227

01/30/2015

11/05/2019

Common Stock

8,227

⁽¹⁷⁾

8,277

Stock Options (right to buy)

$ 7.14

01/30/2015

4,113

01/30/2015

06/03/2020

Common Stock

4,113

⁽¹⁸⁾

4,113

Stock Options (right to buy)

$ 9.94

01/30/2015

5,923

01/30/2015

11/04/2020

Common Stock

5,923

⁽¹⁹⁾

5,923

Stock Options (right to buy)

$ 8.2

01/31/2015

30,000

⁽²⁰⁾

01/31/2025

Common Stock

30,000

$ 0

30,000

Reporting Owners

Reporting Owner Name / Address	Relationships
Reporting Owner Name / Address	Director	10% Owner	Officer	Other
WANSEM PAUL J VAN DER C/O AMTECH SYSTEMS, INC., 131 SOUTH CLARK DRIVE TEMPE, AZ 85281	X		See Remarks

Signatures

/s/ Robert T. Hass, attorney in fact		02/02/2015
^**Signature of Reporting Person		Date

Explanation of Responses:

*	If the form is filed by more than one reporting person, see Instruction 4(b)(v).
**	Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1)	Received in exchange for 1,024,900 shares of BTU International, Inc. ("BTU") common stock in connection with merger (the "Merger") of BTU Merger Sub, Inc. with and into BTU, with BTU surviving as the wholly owned subsidiary of Amtech Systems, Inc. ("Amtech"). On the effective date of the Merger, the closing price of BTU's common stock was $2.62 per share, and the closing price of Amtech's common stock was $8.20 per share.
(2)	Received in exchange for 365,000 shares of BTU common stock in connection with the Merger. On the effective date of the Merger, the closing price of BTU's common stock was $2.62 per share, and the closing price of Amtech's common stock was $8.20 per share.
(3)	Mr. van der Wansem disclaims beneficial ownership of the shares held by the Partnership except to the extent of his pecuniary interest.
(4)	Received in exchange for 115,000 shares of BTU common stock in connection with the Merger. On the effective date of the Merger, the closing price of BTU's common stock was $2.62 per share, and the closing price of Amtech's common stock was $8.20 per share.
(5)	Mr. van der Wansem disclaims beneficial ownership in shares held by his wife.
(6)	Received in exchange for 90,344 shares of BTU common stock in connection with the Merger. On the effective date of the Merger, the closing price of BTU's common stock was $2.62 per share, and the closing price of Amtech's common stock was $8.20 per share.
(7)	Mr. van der Wansem disclaims any beneficial ownership is shares held by the 1981 Van der Wansem Family Trust.
(8)	Received in the Merger in exchange for a stock option to acquire 66,000 shares of BTU common stock for $10.05 per share.
(9)	Received in the Merger in exchange for a stock option to acquire 33,000 shares of BTU common stock for $5.01 per share.
(10)	Received in the Merger in exchange for a stock option to acquire 33,000 shares of BTU common stock for $4.06 per share.
(11)	Received in the Merger in exchange for a stock option to acquire 50,000 shares of BTU common stock for $5.79 per share.
(12)	Received in the Merger in exchange for a stock option to acquire 35,000 shares of BTU common stock for $5.38 per share.
(13)	Received in the Merger in exchange for a stock option to acquire 35,000 shares of BTU common stock for $6.99 per share.
(14)	Received in the Merger in exchange for a stock option to acquire 21,000 shares of BTU common stock for $9.04 per share.
(15)	Received in the Merger in exchange for a stock option to acquire 21,000 shares of BTU common stock for $3.56 per share.
(16)	Received in the Merger in exchange for a stock option to acquire 25,000 shares of BTU common stock for $3.03 per share.
(17)	Received in the Merger in exchange for a stock option to acquire 25,000 shares of BTU common stock for $2.00 per share.
(18)	Received in the Merger in exchange for a stock option to acquire 12,500 shares of BTU common stock for $2.35 per share.
(19)	Received in the Merger in exchange for a stock option to acquire 18,000 shares of BTU common stock for $3.27 per share.
(20)	The options vests in three equal annual installments on each of the first three anniversaries of the grant date, beginning on January 31, 2016.
Remarks: Member of Management Executive Committee

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