Exhibit
32.1
AMTECH SYSTEMS, INC.
AND ITS SUBSIDIARIES
CERTIFICATION PURSUANT
TO
18 U.S.C. SECTION 1350,
AS ADOPTED PURSUANT TO
SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002
In connection with the Quarterly Report of
Amtech Systems, Inc. (the “Company”) on Form 10-Q for the period ended December
31, 2009, as filed with the Securities and Exchange Commission on the date
hereof (the “Report”), I, Jong S. Whang, President and Chief Executive Officer
of the Company, certify, pursuant to 18 U.S.C. ss. 1350, as adopted pursuant to
ss. 906 of the Sarbanes-Oxley Act of 2002, that:
(1) The Report fully complies with the
requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934;
and
(2) The information contained in the Report
fairly presents, in all material respects, the financial condition and result of
operations of the Company.
| By |
/s/ Jong S.
Whang |
|
| Jong S. Whang |
| President and Chief Executive
Officer |
| Date: February 9,
2010 |