Exhibit 21
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
|
Name |
|
Jurisdiction in which incorporated |
|
|
|
|
|
Tempress Systems, Inc. |
|
State of Texas |
|
|
|
|
|
Tempress Holdings B.V. |
|
The Netherlands |
|
|
|
|
|
Tempress Systems B.V. |
|
The Netherlands |
|
|
|
|
|
Tempress Manufacturing B.V. |
|
The Netherlands |
|
|
|
|
|
Tempress Engineering B.V. |
|
The Netherlands |
|
|
|
|
|
P.R. Hoffman Machine Products, Inc. |
|
State of Arizona |
|
|
|
|
|
Bruce Technologies, Inc. |
|
State of Massachusetts |
|
|
|
|
|
Bruce Technologies Europe GmbH |
|
Federal Republic of Germany |