Exhibit 21

AMTECH SYSTEMS, Inc. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT

 

Name

 

Jurisdiction in which incorporated

 

 


 


 

 

Tempress Systems, Inc.

 

State of Texas

 

 

 

 

 

 

 

P.R. Hoffman Machine Products, Inc.

 

State of Arizona

 

 

 

 

 

 

 

Bruce Technologies, Inc.

 

State of Massachusetts

 

 

 

 

 

 

 

Bruce Technologies Europe Gmbh

 

Federal Republic of Germany