Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT
Name |
|
Jurisdiction in which incorporated |
Advanced Compound Materials, Inc. |
|
State of Delaware |
|
|
|
Bruce Technologies, Inc. |
|
State of Massachusetts |
|
|
|
BTU Europe Ltd. |
|
United Kingdom |
|
|
|
BTU International, Inc. |
|
State of Delaware |
|
|
|
BTU Ltd. (Shanghai) |
|
China |
|
|
|
BTU Overseas, Ltd. |
|
State of Delaware |
|
|
|
BTU Overseas (Shanghai) Co., Ltd. |
|
China |
|
|
|
Entrepix, Inc. |
|
State of Arizona |
|
|
|
Entrepix Asia Ptd., Ltd. |
|
Singapore |
|
|
|
Entrepix International, Inc. |
|
State of Arizona |
|
|
|
Intersurface Dynamics, Inc. |
|
State of Connecticut |
|
|
|
P.R. Hoffman Machine Products, Inc. |
|
State of Arizona |