FORM 3
 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
  HASS ROBERT T
 2. Date of Event Requiring Statement (Month/Day/Year)
04/01/2016		 3. Issuer Name and Ticker or Trading Symbol
AMTECH SYSTEMS INC [ASYS]
(Last)
(First)
(Middle)
C/O AMTECH SYSTEMS, INC., 131 SOUTH CLARK DRIVE		 4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
Interim CFO
 5. If Amendment, Date Original Filed(Month/Day/Year)
(Street)

TEMPE, AZ 85281		 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)		 2. Amount of Securities Beneficially Owned
(Instr. 4)		 3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)		 4. Nature of Indirect Beneficial Ownership
(Instr. 5)
Common Stock 1,582
D
 

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 4)		 2. Date Exercisable and Expiration Date
(Month/Day/Year)		 3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)		 4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)		 6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares
Stock Options (right to buy)   (1) 12/09/2018 Amtech Systems, Inc. $.01 par value common stock 3,884 (2) $ 3.8 D  
Stock Options (right to buy)   (3) 11/20/2019 Amtech Systems, Inc. $.01 par value common stock 2,667 $ 6.15 D  
Stock Options (right to buy)   (4) 08/06/2020 Amtech Systems, Inc. $.01 par value common stock 1,333 $ 10.64 D  
Stock Options (right to buy)   (5) 12/15/2021 Amtech Systems, Inc. $.01 par value common stock 5,000 $ 7.98 D  
Stock Options (right to buy)   (6) 12/11/2022 Amtech Systems, Inc. $.01 par value common stock 9,938 (7) $ 2.95 D  
Stock Options (right to buy)   (8) 12/12/2023 Amtech Systems, Inc. $.01 par value common stock 5,000 $ 7.01 D  
Stock Options (right to buy)   (9) 11/19/2024 Amtech Systems, Inc. $.01 par value common stock 2,500 $ 9.98 D  

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
HASS ROBERT T
C/O AMTECH SYSTEMS, INC.
131 SOUTH CLARK DRIVE
TEMPE, AZ 85281		       Interim CFO  

Signatures

/s/ Robert T Hass 04/04/2016
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 5(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 12/09/2008 grant date.
(2) Reporting person has exercised 5,116 of the 9,000 vested options.
(3) Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 11/20/2009 grant date.
(4) Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 08/06/2010 grant date.
(5) Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 12/15/2011 grant date.
(6) Stock options vest one-fourth (1/4) annually commencing on the first anniversary of the 12/11/2012 grant date.
(7) Reporting person has exercised 1,000 of the 10,938 vested options.
(8) Stock options vested one-half (1/2) annually commencing on the first anniversary of the 12/12/2013 grant date.
(9) Stock options vest one-half (1/2) annually commencing on the first anniversary of the 11/19/2014 grant date.

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