Exhibit 21.1

 

AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES

SUBSIDIARIES OF THE REGISTRANT

 

Name		Jurisdiction in which incorporated
Tempress Systems, Inc.		State of Texas
Tempress Group Holding BV		The Netherlands
Tempress Holdings BV		The Netherlands
Tempress Systems BV		The Netherlands
Tempress Manufacturing BV		The Netherlands
Tempress Engineering BV		The Netherlands
Tempress Onroerend Goed BV		The Netherlands
Tempress IP BV		The Netherlands
Tempress Asia Holding BV		The Netherlands
Tempress Hong Kong Limited		Hong Kong
P.R. Hoffman Machine Products, Inc		State of Arizona
Bruce Technologies, Inc		State of Massachusetts
Bruce Technologies Europe GmbH		Federal Republic of Germany
R2D Automation SAS		France
Shanghai Kingstone Semiconductor Limited		China
Kingstone Technology Hong Kong Limited		Hong Kong
Wuxi KingCore Technology Company Limited		China
Amtech Tempress New Energy Technologies Limited		China