March 4, 2011 - 6:30 AM EST

Amtech's Tempress Subsidiary Increases Solar Diffusion Furnace Market Share to 40 Percent Achieving Number 1 Ranking

Mar. 4, 2011 (Business Wire) -- Amtech Systems, Inc. (NASDAQ:ASYS), a global supplier of production and automation systems and related supplies for the manufacture of solar cells, semiconductors, and sapphire and silicon wafers, today announced that its solar subsidiary, Tempress Systems, Inc., has increased its share of the solar diffusion market to approximately 40 percent and has been ranked number one in revenue in calendar 2010 for process tools used in c-Si cell diffusion for the solar market, based on analysis contained within Solarbuzz’s PV Equipment Quarterly of trended quarterly tool revenue.

J.S. Whang, President and Chief Executive Officer of Amtech, commented, “Our top ranking for diffusion furnace revenue in 2010 reflects our technology leadership in high efficiency solar diffusion, which is our core competency, and our success in expanding our market share in our diffusion business to become the market leader, enabling improved profitability. We remain focused on successful execution of our solar growth strategy and continue to see a healthy order pipeline, driven by the intense effort with the solar industry to increase production capacity and cell efficiency.”

About Amtech Systems, Inc.

Amtech Systems, Inc. manufactures capital equipment, including silicon wafer handling automation, thermal processing equipment and related consumables used in fabricating solar cells and semiconductor devices. Semiconductors, or semiconductor chips, are fabricated on silicon wafer substrates, sliced from ingots, and are part of the circuitry, or electronic components, of many products including solar cells, computers, telecommunications devices, automotive products, consumer goods, and industrial automation and control systems. The Company’s wafer handling, thermal processing and consumable products currently address the diffusion, oxidation, deposition, PECVD, and PSG removal steps used in the fabrication of solar cells, semiconductors, MEMS and the polishing of newly sliced silicon wafers.

Statements contained in this press release that are not historical facts may be forward looking statements within the meaning of the Private Litigation Reform Act. Such statements may use words such as “proposed,” "anticipate," "believe," "estimate," "expect," "intend," "predict," "project" and similar expressions as they relate to Amtech Systems, Inc. or our management. When we make forward-looking statements, we are basing them on our management's beliefs and assumptions, using information currently available to us. Although we believe that the expectations reflected in the forward looking statements are reasonable, these forward-looking statements are subject to risks, uncertainties and assumptions including the risks discussed in our filings with the Securities and Exchange Commission. If one or more of these risks materialize, or if our underlying assumptions prove to be incorrect, actual results may vary materially from what we projected. Any forward looking statements contained in this press release reflect our current views with respect to future events and are subject to these and other risks, uncertainties and assumptions relating to our operations, results of operations, growth strategy and liquidity. We have no intention, and disclaim any obligation, to update or revise any forward-looking statements, whether as a result of new information, future results or otherwise.

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Amtech Systems, Inc.
Bradley C. Anderson, 480-967-5146
Chief Financial Officer

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MKR Group, Inc.
Todd Kehrli or Jim Byers, 323-468-2300
Investor Relations
asys@mkr-group.com